Small flow gas mass flow sensor is specially designed for the measurement and process control of various small flow gas.This series of sensors are made of MEMS flow sensing chip independently developed by our company, which is suitable for all kinds of clean and dry gases.Unique packaging technology makes it possible to measure the flow in different ranges under the same pipe diameter, low cost, easy to install, no need for temperature and pressure compensation, can replace the traditional volume or differential pressure flow sensor with a variety of signal output, through the communication interface can realize the flexible configuration of the sensor and parameter query. 

Product features:

The sensor has high sensitivity and minimal starting flow

The sensor chip adopts thermal mass flow measurement without temperature and pressure compensation, which ensures the high precision measurement of the sensor

Multi-sensor integration is realized on a single chip, and the range ratio is 100:1 or higher

The output mode is flexible, which can be used to actively upload data (RS232) through communication interface, or to output linear analog voltage through analog interface

High stability of zero point

Full range high stability, high accuracy and excellent repeatability

Low power consumption and low voltage loss

Quick response